IntelliFAB allows you to debug your process flow and your mask set even before you enter the clean room. It allows you to make a virtual prototypes to save costly fabrication mistakes.

Welcome to your virtual fab

Until now, MEMS designers have typically focused purely on geometric representation of the device in order to analyze device behavior.

The drawback of this methodology is that process induced effects may vary the geometry of the structure significantly. For example, the boron diffusion as an etch stop layer for bulk silicon processing may overstress the structure, strain gradients in poly-silicon structures can distort features, or an anodic bonding process may break down protective oxide films.

IntelliFAB allows designers to takes a different approach. Process flow forms the basis of creating your devices. Our comprehensive process simulation modules incorporate deposition, etching, bonding, doping, electroplating, liftoff, and other process steps common in MEMS design. Other process-induced effects, such as micro-assembly, are also addressed to generate accurate geometric models for the complete range of MEMS devices.

IntelliFAB is directly linked with MEMaterial, a MEMS process database that stores material properties as a function of your machine settings. By developing the fabrication process in conjunction with the analysis model, IntelliSuite enables engineers to perform more accurate device physics analysis and produce manufacturable devices faster.

Process visualization

With FabViewer, you can see exactly what your MEMS device looks like – before it’s been created!

IntelliFab includes FabViewer, an easy-to-use process visualization tool that allows users to quickly visualize a process flow created in IntelliFab. Users can view their structure at each process step or set the simulation to play on a loop. The ability to view cross sections at any angle or orientation makes it easy to debug the process or perform a failure analysis.

Get the (power)point across

Photo-realistic rendering of MEMS structures makes FabViewer an absolute must-have for engineers creating presentations for a design review or professors making slideshows for a lecture. Seven different resolution settings enable users to adjust the simulation speed and image quality to their liking. Even at the highest resolution, the simulation of highly complex MEMS structures and process flows is completed in minutes.

And with one click you can export the entire process flow to Powerpoint, ideal for documentation or just getting the point across!

Download the PPT/PDF file below to take a look at the high-quality export capability.
Electrothermal Actuator (3D): PPT PDF

MEMS Process Editor

A typical MEMS process flow can consist of hundreds of process steps which need to be cataloged and debugged; IntelliFAB makes editing and organizing large process tables easy. Built in grouping, filtering, and arrangement tools allow you to section, organize and debug large process tables.

IntelliFAB allows you to quickly build and debug your process traveler down to the last detail.

Foundry ready templates

Processes can be custom-designed one step at a time, or engineers can draw from a wide range of foundry-ready process templates. Users create their own process flows from a database of over 70 process steps or by including custom process steps. Process flows can be saved as templates for repeated use.

Support for popular processes MUMPS, SUMMiT-V, Infotonics (SOI Hybrid), AMI_MOSIS, Bosch Surface Micromachining, LIGA, Cornell SCREAM is included out of the box

Take the pain out of meshing

Hexpresso, our mesh synthesis tool is now integrated with IntelliFAB. With click of a button you can create high fidelity, all-hexahedral meshes from the process flow. MEMS Designers can spend up to 70% of their design person-hours creating and manipulating meshes. Solid models created by IntelliFAB can be directly exported to analysis engines with the click of a button, saving you considerable effort and time.

IntelliFAB uses true process information along with your mask layouts to create the device model for analysis.